The handbook details several critical optical mechanisms used to measure dimensions: Handbook of optical dimensional metrology - ResearchGate
: Details fine features at the submicron level using advanced micro-metrology. Key Technical Topics Handbook of optical dimensional metrology
The text is structured to provide a foundation for evaluating optical methods by comparing them to traditional mechanical gaging, highlighting specific limitations and error sources. It organizes metrology methods based on the scale of the object being measured: Handbook of optical dimensional metrology